NEWS
鏂伴椈涓績
鎺㈢储澶ц繛楂樼函姘︽皵鍦ㄥ崐瀵间綋鍒堕€犱腑鐨勫叧閿綔鐢
鍙戝竷鏃堕棿锛
2024-08-15
# 鎺㈢储澶ц繛楂樼函姘︽皵鍦ㄥ崐瀵间綋鍒堕€犱腑鐨勫叧閿綔鐢?# 寮曡█鍦ㄧ幇浠ｇ鎶€鐨勬氮娼腑锛屽崐瀵间綋鍒堕€犱綔涓轰竴涓牳蹇冮鍩燂紝鏀拺鐫€鏃犳暟楂樼鎶€浜у搧鐨勮癁鐢熴€傝€屽湪杩欒儗鍚庯紝璁稿鐪嬩技涓嶈捣鐪肩殑鍏冪礌鍗村彂鎸ョ潃涓嶅彲鎴栫己鐨勪綔鐢ㄣ€備粖澶╋紝鎴戜滑灏辨潵鑱婅亰澶ц繛楂樼函姘︽皵鍦ㄥ崐瀵间綋鍒堕€犱腑鐨勫叧閿綔鐢ㄣ€?# 楂樼函姘︽皵鐨勭绉橀潰绾卞ぇ瀹跺彲鑳戒細闂紝姘︽皵涓嶅氨鏄偅绉嶅湪娲惧涓婂厖姘旂悆鐨勬皵浣撳悧锛熸病閿欙紝浣嗛珮绾唉姘斿彲缁濋潪鏅€氭唉姘斻€傚畠鏄竴绉嶆瀬涓虹函鍑€鐨勬皵浣擄紝鍑犱箮涓嶅惈鍏朵粬鏉傝川锛岃繖浣垮緱瀹冨湪鍗婂浣撳埗閫犺繃绋嬩腑鏄惧緱灏や负閲嶈銆傛兂璞′竴涓嬶紝濡傛灉浣犲湪鐑樼剻鏃剁敤鐨勬槸鍚湁鏉傝川鐨勯潰绮夛紝鏈€缁堢殑铔嬬硶鑳藉ソ鍚冨悧锛熷悓鐞嗭紝楂樼函姘︽皵鐨勭函搴︾洿鎺ュ叧绯诲埌鍗婂浣撳櫒浠剁殑璐ㄩ噺銆?# 鍗婂浣撳埗閫犵殑鈥滈殣褰㈠姪鎵嬧€濆湪鍗婂浣撳埗閫犺繃绋嬩腑锛岄珮绾唉姘旇骞挎硾搴旂敤浜庡喎鍗村拰淇濇姢銆傜壒鍒槸鍦ㄥ寲瀛︽皵鐩告矇绉紙CVD锛夊拰绛夌瀛愪綋澧炲己鍖栧姘旂浉娌夌Н锛圥ECVD锛夌瓑鎶€鏈腑锛岄珮绾唉姘旇兘澶熸湁鏁堝湴鎺у埗娓╁害锛岀‘淇濇潗鏂欑殑鍧囧寑娌夌Н銆傝繖灏卞儚鏄粰鐢靛瓙鍏冧欢绌夸笂浜嗕竴灞備繚鎶よ。锛岄槻姝㈠叾鍦
## 寮曡█
鍦ㄧ幇浠ｇ鎶€鐨勬氮娼腑锛屽崐瀵间綋鍒堕€犱綔涓轰竴涓牳蹇冮鍩燂紝鏀拺鐫€鏃犳暟楂樼鎶€浜у搧鐨勮癁鐢熴€傝€屽湪杩欒儗鍚庯紝璁稿鐪嬩技涓嶈捣鐪肩殑鍏冪礌鍗村彂鎸ョ潃涓嶅彲鎴栫己鐨勪綔鐢ㄣ€備粖澶╋紝鎴戜滑灏辨潵鑱婅亰澶ц繛楂樼函姘︽皵鍦ㄥ崐瀵间綋鍒堕€犱腑鐨勫叧閿綔鐢ㄣ€侟br />
## 楂樼函姘︽皵鐨勭绉橀潰绾包br />
澶у鍙兘浼氶棶锛屾唉姘斾笉灏辨槸閭ｇ鍦ㄦ淳瀵逛笂鍏呮皵鐞冪殑姘斾綋鍚楋紵娌￠敊锛屼絾楂樼函姘︽皵鍙粷闈炴櫘閫氭唉姘斻€傚畠鏄竴绉嶆瀬涓虹函鍑€鐨勬皵浣擄紝鍑犱箮涓嶅惈鍏朵粬鏉傝川锛岃繖浣垮緱瀹冨湪鍗婂浣撳埗閫犺繃绋嬩腑鏄惧緱灏や负閲嶈銆傛兂璞′竴涓嬶紝濡傛灉浣犲湪鐑樼剻鏃剁敤鐨勬槸鍚湁鏉傝川鐨勯潰绮夛紝鏈€缁堢殑铔嬬硶鑳藉ソ鍚冨悧锛熷悓鐞嗭紝楂樼函姘︽皵鐨勭函搴︾洿鎺ュ叧绯诲埌鍗婂浣撳櫒浠剁殑璐ㄩ噺銆侟br />
## 鍗婂浣撳埗閫犵殑鈥滈殣褰㈠姪鎵嬧€滭br />
鍦ㄥ崐瀵间綋鍒堕€犺繃绋嬩腑锛岄珮绾唉姘旇骞挎硾搴旂敤浜庡喎鍗村拰淇濇姢銆傜壒鍒槸鍦ㄥ寲瀛︽皵鐩告矇绉紙CVD锛夊拰绛夌瀛愪綋澧炲己鍖栧姘旂浉娌夌Н锛圥ECVD锛夌瓑鎶€鏈腑锛岄珮绾唉姘旇兘澶熸湁鏁堝湴鎺у埗娓╁害锛岀‘淇濇潗鏂欑殑鍧囧寑娌夌Н銆傝繖灏卞儚鏄粰鐢靛瓙鍏冧欢绌夸笂浜嗕竴灞備繚鎶よ。锛岄槻姝㈠叾鍦ㄩ珮娓╃幆澧冧腑鍙楁崯銆侟br />
鍙﹀锛岄珮绾唉姘旂殑楂樼儹瀵肩巼浣垮叾鍦ㄥ喎鍗寸郴缁熶腑琛ㄧ幇寰楀挨涓哄嚭鑹层€傛瘮濡傦紝褰撶鏅剁墖鍦ㄩ珮娓╀笅鍙嶅簲鏃讹紝杩囩儹鍙兘瀵艰嚧鏉愭枡鐨勫彉褰㈡垨鎬ц兘涓嬮檷銆傛鏃讹紝澶ц繛楂樼函姘︽皵鐨勮繀閫熷喎鍗翠綔鐢紝鍙互纭繚鐢熶骇杩囩▼鐨勭ǔ瀹氭€э紝浠庤€屾彁楂樹骇鍝佺殑鑹巼銆侟br />
## 鎻愬崌鍒堕€犳晥鐜囩殑绉樺瘑姝﹀櫒
浼楁墍鍛ㄧ煡锛屽崐瀵间綋鍒堕€犺繃绋嬪鏉備笖鑰楁椂銆傝€屽ぇ杩為珮绾唉姘旂殑浣跨敤锛屽彲浠ュぇ澶ф彁楂樼敓浜ф晥鐜囥€傞€氳繃浼樺寲姘斾綋娴侀噺鍜屽帇鍔涳紝鍒堕€犲晢鑳藉缂╃煭鍙嶅簲鏃堕棿銆傝繖灏卞ソ姣斿湪椹媺鏉炬瘮璧涗腑锛岄€夋墜浠壘鍒颁竴鏉℃洿鐭殑璺戦亾锛岃交鏉炬姷杈剧粓鐐广€傜粨鏋滃浣曪紵姣棤鐤戦棶锛屽巶鍟嗙殑鎴愭湰闄嶄綆锛屽競鍦虹珵浜夊姏鎻愬崌銆侟br />
## 搴斿鏈潵鎸戞垬鐨勫叧閿?br />
闅忕潃绉戞妧鐨勪笉鏂繘姝ワ紝鍗婂浣撹涓氶潰涓寸潃瓒婃潵瓒婂鐨勬寫鎴樸€備粠鏂版潗鏂欑殑寮€鍙戝埌鏇村皬灏哄鍏冧欢鐨勭敓浜э紝瑕佹眰涔熷湪涓嶆柇鎻愰珮銆傝繖鏃讹紝澶ц繛楂樼函姘︽皵鐨勪綔鐢ㄤ究鏄惧緱鏇村姞绐佸嚭銆傞珮绾害鐨勬唉姘斾笉浠呰兘淇濋殰鐜版湁鎶€鏈殑绋冲畾鎬э紝杩樿兘涓烘湭鏉ョ殑鏂版妧鏈彁渚涘彲闈犵殑鏀寔銆侟br />
姣斿锛岄噺瀛愯绠楀拰浜哄伐鏅鸿兘绛夊墠娌挎妧鏈紝瀵瑰崐瀵间綋鏉愭枡鐨勬€ц兘鎻愬嚭浜嗘洿楂樼殑瑕佹眰銆傝€岄珮绾唉姘旂殑绋冲畾鎬у拰浼樿秺鐨勭墿鐞嗘€ц川锛屼娇鍏舵垚涓鸿繖浜涢鍩熶笉鍙垨缂虹殑鈥滃熀鐭斥€濄€侟br />
## 鎬荤粨
缁间笂鎵€杩帮紝澶ц繛楂樼函姘︽皵鍦ㄥ崐瀵间綋鍒堕€犱腑鎵紨鐫€鑷冲叧閲嶈鐨勮鑹层€備粠鍐峰嵈淇濇姢鍒版彁鍗囨晥鐜囷紝瀹冪殑姣忎竴娆″簲鐢ㄩ兘涓鸿涓氱殑鍙戝睍娉ㄥ叆浜嗘柊鐨勬椿鍔涖€傚鏋滄病鏈夊畠锛屾垜浠殑鐢靛瓙浜у搧鍙兘鏃犳硶杈惧埌浠婂ぉ鐨勯珮搴︺€傚洜姝わ紝閲嶈骞跺悎鐞嗗埄鐢ㄥぇ杩為珮绾唉姘旓紝灏嗕负鍗婂浣撹涓氱殑鏈潵鍙戝睍寮€杈熸柊鐨勯亾璺€侟br />
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